화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations
Drusedau TP, Bock T, John TM, Klabunde F, Eckstein W
Journal of Vacuum Science & Technology A, 17(5), 2896, 1999
2 Germanium-Carbon Multilayer Films Prepared by Magnetron Sputtering - Structure and Thermally-Induced Formation of Ge-Nanocrystals
John TM, Veit P, Anton R, Drusedau TP
Thin Solid Films, 296(1-2), 69, 1997