| 1 |
Accuracy of color determination from spectroscopic ellipsometry measurements
Johs B, Arwin H, Wagner T, Appel D, Peros D
Thin Solid Films, 519(9), 2711, 2011 |
| 2 |
Precision in ellipsometrically determined sample parameters: simulation and experiment
Johs B, Herzinger CM
Thin Solid Films, 455-56, 66, 2004 |
| 3 |
Dielectric function of thin metal films by combined in situ transmission ellipsometry and intensity measurements
Pribil GK, Johs B, Ianno NJ
Thin Solid Films, 455-56, 443, 2004 |
| 4 |
Generalized spectroscopic ellipsometry and Mueller-matrix study of twisted nematic and super twisted nematic liquid crystals
Hilfiker JN, Johs B, Herzinger CM, Elman JF, Montbach E, Bryant D, Bos PJ
Thin Solid Films, 455-56, 596, 2004 |
| 5 |
General virtual interface algorithm for in situ spectroscopic ellipsometric data analysis
Johs B
Thin Solid Films, 455-56, 632, 2004 |
| 6 |
Control of etch depth in patterned semiconductor substrates using real time spectroscopic ellipsometry
Cho SJ, Snyder PG, Ianno NJ, Herzinger CM, Johs B
Thin Solid Films, 455-56, 645, 2004 |
| 7 |
Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
Hilfiker JN, Bungay CL, Synowicki RA, Tiwald TE, Herzinger CM, Johs B, Pribil GK, Woollam JA
Journal of Vacuum Science & Technology A, 21(4), 1103, 2003 |
| 8 |
Etch depth control in bulk GaAs using patterning and real time spectroscopic ellipsometry
Cho SJ, Snyder PG, Herzinger CM, Johs B
Journal of Vacuum Science & Technology B, 20(1), 197, 2002 |
| 9 |
Closed-loop control of resonant tunneling diode barrier thickness using in situ spectroscopic ellipsometry
Roth JA, Williamson WS, Chow DH, Olson GL, Johs B
Journal of Vacuum Science & Technology B, 18(3), 1439, 2000 |
| 10 |
Use of spectroscopic ellipsometry for feedback control during the growth of thin AlAs layers
Beaudoin M, Johnson SR, Boonzaayer MD, Zhang YH, Johs B
Journal of Vacuum Science & Technology B, 17(3), 1233, 1999 |
