검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Plasma conditions for as-grown low temperature poly-Si formation on SiO2 substrate by sputtering and plasma enhanced chemical vapor deposition processes Takeya M, Park WS, Jong GS, Ohmi T Journal of Vacuum Science & Technology A, 16(3), 1917, 1998 |
| 2 |
Low-Temperature Polycrystalline Silicon Deposition by Very High-Frequency Sputtering Using Ar and H-2 Jang YH, Park WS, Takeya M, Jong GS, Ohmi T Journal of the Electrochemical Society, 144(11), 3973, 1997 |