검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Impact of silica-substrate chemistry on tantalum nitride thin films deposited by atomic layer deposition: Microstructure, chemistry and electrical behaviors Volpi F, Cadix L, Berthome G, Coindeau S, Encinas T, Jourdan N, Blanquet E Thin Solid Films, 669, 392, 2019 |
| 2 |
Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese Jourdan N, Krishtab MB, Baklanov MR, Meersschaut J, Wilson CJ, Ablett JM, Fonda E, Zhao L, Van Elshocht S, Tokei Z, Vancoille E Electrochemical and Solid State Letters, 15(5), H176, 2012 |
| 3 |
Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM Gerritsen E, Emonet N, Caillat C, Jourdan N, Piazza M, Fraboulet D, Boeck B, Berthelot A, Smith S, Mazoyer P Solid-State Electronics, 49(11), 1767, 2005 |
| 4 |
Structural Study of Linear Polyesters .1. Crystal-Structure of Poly(Trimethylene Sebacate), Established from X-Ray and Electron-Diffraction Data Jourdan N, Deguire S, Brisse F Macromolecules, 28(24), 8086, 1995 |