검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real time monitoring of layer growth on planetary reactor((R)) by reflectance-anisotropy-spectroscopy Habets N, Schmitt T, Deufel M, Lunenburger M, Heuken M, Juergensen H Thin Solid Films, 409(1), 43, 2002 |
| 2 |
Uniformity control of group-III nitrides grown on 5 x 3 inch Al2O3 substrates in Planetary Reactors((R)) Protzmann H, Luenenbuerger M, Bremser M, Heuken M, Juergensen H Journal of Crystal Growth, 221, 629, 2000 |