검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Instability of metal barrier with porous methyl silsesquioxane films Wang PI, Juneja JS, Ou Y, Lu TM, Spencer GS Journal of the Electrochemical Society, 155(2), H53, 2008 |
| 2 |
Enhancement of cu(hfac)(2) chemisorption on the parylene surface by N-2 plasma surface modification Pimanpang S, Wang PI, Ye D, Juneja JS, Wang GC, Lu TM Journal of the Electrochemical Society, 154(10), G215, 2007 |
| 3 |
Stability of Cu on epoxy siloxane polymer under bias temperature stress Wang PI, Juneja JS, Murarka SP, Lu TM, Jezewski C, Ghoshal R, Ghoshal R, Bakhru H Journal of the Electrochemical Society, 153(4), G358, 2006 |
| 4 |
Bias-temperature stability of Ti-Si-N-O films Ee YC, Juneja JS, Wang PI, Lu TM, Bakhru H, Chan L, Law SB, Yong C, Chen Z, Xu S Journal of the Electrochemical Society, 153(5), G470, 2006 |
| 5 |
Interfacial interaction of in situ Cu growth on tetrasulfide self-assembled monolayer on plasma treated parylene surface Pimanpang S, Wang PI, Juneja JS, Wang GC, Lu TM Journal of Vacuum Science & Technology A, 24(5), 1884, 2006 |
| 6 |
Dielectric barriers, pore sealing, and metallization Juneja JS, Wang PI, Karabacak T, Lu TM Thin Solid Films, 504(1-2), 239, 2006 |
| 7 |
Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films Jain P, Juneja JS, Bhagwat V, Rymaszewski EJ, Lu TM, Cale TS Journal of Vacuum Science & Technology A, 23(3), 512, 2005 |
| 8 |
Pressure dependent Parylene-N pore sealant penetration in porous low-kappa dielectrics Juneja JS, Ten Eyck GA, Bakhru H, Lu TM Journal of Vacuum Science & Technology B, 23(5), 2232, 2005 |