검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 2 |
Electron projection lithography mask format layer stress measurement and simulation of pattern transfer distortion Reu PL, Chen CF, Engelstad RL, Lovell EG, Bayer T, Greschner J, Kalt S, Weiss H, Wood OR, Mackay RS Journal of Vacuum Science & Technology B, 20(6), 3053, 2002 |