화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Extension of Far UV spectroscopic ellipsometry studies of High-kappa dielectric films to 130 nm
Kamineni VK, Hilfiker JN, Freeouf JL, Consiglio S, Clark R, Leusink GJ, Diebold AC
Thin Solid Films, 519(9), 2894, 2011
2 Investigation of optical properties of benzocyclobutene wafer bonding layer used for 3D interconnects via infrared spectroscopic ellipsometry
Kamineni VK, Singh P, Kong LW, Hudnall J, Qureshi J, Taylor C, Rudack A, Arkalgud S, Diebold AC
Thin Solid Films, 519(9), 2924, 2011
3 Dielectric properties and thickness metrology of strain engineered GaN/AlN/Si (111) thin films grown by MOCVD
Tungare M, Kamineni VK, Shahedipour-Sandvik F, Diebold AC
Thin Solid Films, 519(9), 2929, 2011
4 Layer-by-layer nanoassembly of polyelectrolytes using formamide as the working medium
Kamineni VK, Lvov YM, Dobbins TA
Langmuir, 23(14), 7423, 2007