검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Dynamics of SiO Desorption in Reactive Scattering of O-2 with a Silicon Surface Nakamura KG, Kamioka I, Kitajima M Journal of Chemical Physics, 104(9), 3403, 1996 |
| 2 |
Initial Plasma Oxidation-Kinetics of Silicon - DC Bias Effects Kamioka I, Nakamura KG, Kawabe T, Kitajima M Thin Solid Films, 281-282, 98, 1996 |
| 3 |
Real-Time Observation of Ultrathin Silicon-Oxide Film Growth Using Rapid Ellipsometry Kuroki H, Nakamura KG, Kamioka I, Kawabe T, Kitajima M Journal of Vacuum Science & Technology A, 12(4), 1431, 1994 |