검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry Perlich J, Kamm FM, Rau J, Scholze F, Ulm G Journal of Vacuum Science & Technology B, 22(6), 3059, 2004 |
| 2 |
A combined top-down/bottom-up approach to the microscopic localization of metallic nanodots Spatz JP, Chan VZH, Mossmer S, Kamm FM, Plettl A, Ziemann P, Moller M Advanced Materials, 14(24), 1827, 2002 |