검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of Chemical Structure and Removal of Positive-Tone Novolak Resist Having Various Prebake Temperature using Wet Ozone Angata Y, Goto Y, Takahashi S, Kono A, Koike K, Nishiyama I, Kamoto R, Horibe H KAGAKU KOGAKU RONBUNSHU, 39(2), 144, 2013 |
| 2 |
SIMS depth profile of copper in low-k dielectrics under electron irradiation for charge compensation Yamada K, Fujiyama N, Sameshima J, Kamoto R, Karen A Applied Surface Science, 203, 512, 2003 |