화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 A comparison of the effects of energy management using heat pump water heaters and batteries in photovoltaic -installed houses
Iwafune Y, Kanamori J, Sakakibara H
Energy Conversion and Management, 148, 146, 2017
2 Proton channeling into the Si substrate at the bottom of ultrahigh-aspect-ratio contact holes during plasma etching
Ichimori T, Ikegami N, Hirashita N, Kanamori J
Thin Solid Films, 374(2), 228, 2000
3 Study on characterizing fluorocarbon polymer films deposited on an inner surface during high-aspect-ratio contact hole etching using secondary ion mass spectroscopy
Liu GL, Ikegami N, Uchida H, Hirashita N, Kanamori J
Journal of Vacuum Science & Technology B, 17(2), 355, 1999