검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of radical-distribution control on etching-profile uniformity in dielectric etching Kobayashi H, Yokogawa K, Maeda K, Kanekiyo T, Izawa M Thin Solid Films, 515(12), 4937, 2007 |
| No. | Article |
|---|---|
| 1 |
Effects of radical-distribution control on etching-profile uniformity in dielectric etching Kobayashi H, Yokogawa K, Maeda K, Kanekiyo T, Izawa M Thin Solid Films, 515(12), 4937, 2007 |