화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Hydraulic fracturing volume is associated with induced earthquake productivity in the Duvernay play
Schultz R, Atkinson G, Eaton DW, Gu YJ, Kao H
Science, 359(6373), 304, 2018
2 Implementation of real-time proximity effect correction in a raster shaped beam tool
Boegli V, Johnson L, Kao H, Veneklasen L, Hofmann U, Finkelstein I, Stovall S, Rishton S
Journal of Vacuum Science & Technology B, 18(6), 3138, 2000
3 Raster shaped beam pattern generation
Rishton SA, Varner JK, Veneklasen LH, Boegli V, Sagle AL, Hofmann U, Kao H, Wang W
Journal of Vacuum Science & Technology B, 17(6), 2927, 1999
4 Aerial image slope and proximity effects on critical dimensions in mask lithography
Sagle A, Gesley M, Kao H, Innes R
Journal of Vacuum Science & Technology B, 16(6), 3563, 1998