화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Ultrafast silicon based photodetectors
Buchal C, Loken M, Lipinsky T, Kappius L, Mantl S
Journal of Vacuum Science & Technology A, 18(2), 630, 2000
2 Self-ordering of CoSi2 precipitates and epitaxial layer growth of CoSi2 on Si(100)
Mantl S, Hacke M, Bay HL, Kappius L, Mesters S
Thin Solid Films, 321(1-2), 251, 1998
3 Submicrometer patterning of epitaxial CoSi2/Si(111) by local oxidation
Klinkhammer F, Kappius L, Mesters S
Thin Solid Films, 318(1-2), 163, 1998
4 Retarded diffusion of boron in Si due to the formation of an epitaxial CoSi2 layer
Kappius L, Bay HL, Mantl S, Tyagi AK, Breuer U, Becker JS
Thin Solid Films, 336(1-2), 26, 1998