검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope Kolanek K, Tallarida M, Karavaev K, Schmeisser D Thin Solid Films, 518(16), 4688, 2010 |
| 2 |
Optimization of the AION buffer layer for PrXOY/Si stacks Henkel K, Burkov Y, Karavaev K, Torche M, Schwiertz C, Schmeisser D Journal of Vacuum Science & Technology B, 27(1), 253, 2009 |
| 3 |
HfO2/Si interface formation in atomic layer deposition films: An in situ investigation Tallarida M, Karavaev K, Schmeisser D Journal of Vacuum Science & Technology B, 27(1), 300, 2009 |