검색결과 : 2건
No. | Article |
---|---|
1 |
Study of the Material Properties and Suitability of Plasma-Deposited Fluorine-Doped Silicon Dioxides for Low Dielectric-Constant Interlevel Dielectrics Shannon VL, Karim MZ Thin Solid Films, 270(1-2), 498, 1995 |
2 |
Properties of Mixed-Phase BN Films Deposited by RF Pacvd Cameron DC, Karim MZ, Hashmi MS Thin Solid Films, 236(1-2), 96, 1993 |