검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
First Observations of 0.1 Mu-M Size Particles on Si Wafers Using Atomic-Force Microscopy and Optical-Scattering Fujino N, Karino I, Kobayashi J, Kuramoto K, Ohomori M, Yasutake M, Wakiyama S Journal of the Electrochemical Society, 143(12), 4125, 1996 |
| 2 |
Instrumentation of a Wafer Inspection Large-Sample Atomic-Force Microscope Yasutake M, Wakiyama S, Kitamura M, Fujino N, Karino I, Oumori M Thin Solid Films, 281-282, 576, 1996 |