검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH4/H-2 Chemistry Lysevych M, Tan HH, Karouta F, Jagadish C Journal of the Electrochemical Society, 158(3), H281, 2011 |
| 2 |
Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP Carlstrom CF, van der Heijden R, Andriesse MSP, Karouta F, van der Heijden RW, van der Drift E, Salemink HWM Journal of Vacuum Science & Technology B, 26(5), 1675, 2008 |
| 3 |
Fabrication of two dimensional GaN nanophotonic crystals (31) Rong B, Salemink HWM, Roeling EM, Van der Heijden R, Karouta F, Van der Drift E Journal of Vacuum Science & Technology B, 25(6), 2632, 2007 |
| 4 |
Cl-2/O-2-inductively coupled plasma etching of deep hole-type photonic crystals in InP Carlstrom CF, van der Heijden R, Karouta F, van der Heijden RW, Salemink HWM, van der Drift E Journal of Vacuum Science & Technology B, 24(1), L6, 2006 |
| 5 |
Optimisation of the Ti/Al/Ni/Au ohmic contact on AlGaN/GaN FET structures Jacobs B, Kramer MCJCM, Geluk EJ, Karouta F Journal of Crystal Growth, 241(1-2), 15, 2002 |
| 6 |
Controlled anodic oxidation for high precision etch depth in AlGaAs ill-V semiconductor structures Buda M, Smalbrugge E, Geluk EJ, Karouta F, Acket GA, van de Roer TG, Kaufmann LMF Journal of the Electrochemical Society, 145(3), 1076, 1998 |