화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effect of the deposition process and substrate temperature on the microstructure defects and electrical conductivity of molybdenum thin films
Rafaja D, Kostenbauer H, Muhle U, Loffler C, Schreiber G, Kathrein M, Winkler J
Thin Solid Films, 528, 42, 2013
2 On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings
Pfeiler M, Scheu C, Hutter H, Schnoller J, Michotte C, Mitterer C, Kathrein M
Journal of Vacuum Science & Technology A, 27(3), 554, 2009