검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low stress development of poly(methylmethacrylate) for high aspect ratio structures Rooks MJ, Kratschmer E, Viswanathan R, Katine J, Fontana RE, MacDonald SA Journal of Vacuum Science & Technology B, 20(6), 2937, 2002 |
| No. | Article |
|---|---|
| 1 |
Low stress development of poly(methylmethacrylate) for high aspect ratio structures Rooks MJ, Kratschmer E, Viswanathan R, Katine J, Fontana RE, MacDonald SA Journal of Vacuum Science & Technology B, 20(6), 2937, 2002 |