검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermal stability of thin ZrO2 films prepared by a sol-gel process on Si(001) substrates Doscher H, Lilienkamp G, Iskra P, Kazempoor M, Daum W Journal of Vacuum Science & Technology B, 28(4), C5B5, 2010 |
| No. | Article |
|---|---|
| 1 |
Thermal stability of thin ZrO2 films prepared by a sol-gel process on Si(001) substrates Doscher H, Lilienkamp G, Iskra P, Kazempoor M, Daum W Journal of Vacuum Science & Technology B, 28(4), C5B5, 2010 |