검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Monolithic integration of InP-based transistors on Si substrates using MBE Liu WK, Lubyshev D, Fastenau JM, Wu Y, Bulsara MT, Fitzgerald EA, Urteaga M, Ha W, Bergman J, Brar B, Hoke WE, LaRoche JR, Herrick KJ, Kazior TE, Clark D, Smith D, Thompson RF, Drazek C, Daval N Journal of Crystal Growth, 311(7), 1979, 2009 |
| 2 |
High-Rate CH4-H-2 Plasma Etch Processes for InP Whelan CS, Kazior TE, Hur KY Journal of Vacuum Science & Technology B, 15(5), 1728, 1997 |
| 3 |
Optimization of a Low Damage, High-Resolution Etch Process for Sinx in an ECR Reactor Olson RJ, Kazior TE, Lane B, Holber WM, Bourget L Journal of the Electrochemical Society, 143(1), 288, 1996 |
| 4 |
Reactive Ion Etching of InP via Holes Hur KY, Guerin BJ, Kazior TE Journal of Vacuum Science & Technology B, 12(3), 1410, 1994 |
| 5 |
Electron-Beam Sublimation Deposited and Lifted-Off Carbon Mask for InP Reactive Ion Etching Hur KY, Mckenna TP, Kazior TE Journal of Vacuum Science & Technology B, 12(5), 3046, 1994 |