검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Mask blanks for extreme ultraviolet lithography : Ion beam sputter deposition of low defect density Mo/Si multilayers Kearney PA, Moore CE, Tan SI, Vernon SP, Levesque RA Journal of Vacuum Science & Technology B, 15(6), 2452, 1997 |
| 2 |
Growth Modes of Pd, Ag, and Si Thin-Films on B Kearney PA, Slaughter JM, Shen DH, Falco CM Journal of Vacuum Science & Technology A, 13(1), 78, 1995 |