검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
'Real-time' multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiNx deposition Kechagias VG, Gioti M, Logothetidis S, Benferhat R, Teer D Thin Solid Films, 364(1-2), 213, 2000 |
| No. | Article |
|---|---|
| 1 |
'Real-time' multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiNx deposition Kechagias VG, Gioti M, Logothetidis S, Benferhat R, Teer D Thin Solid Films, 364(1-2), 213, 2000 |