검색결과 : 1건
No. | Article |
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1 |
Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory Ho CY, He JH, Chang YP, Lien CH Thin Solid Films, 517(24), 6850, 2009 |
No. | Article |
---|---|
1 |
Selective epitaxial silicon growth in high aspect ratio contact on 70 nm node flash memory Ho CY, He JH, Chang YP, Lien CH Thin Solid Films, 517(24), 6850, 2009 |