검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry Heil SBS, Langereis E, Kemmeren A, Roozeboom F, de Sanden MCMV, Kessels WMM Journal of Vacuum Science & Technology A, 23(4), L5, 2005 |