검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Smooth and high quality epitaxial strained Ge grown on SiGe strain relaxed buffers with 70-85% Ge Loo R, Souriau L, Ong P, Kenis K, Rip J, Storck P, Buschhardt T, Vorderwestner M Journal of Crystal Growth, 324(1), 15, 2011 |
| 2 |
Particle Removal Efficiency and Damage Analysis on Silicon Wafers after Megasonic Cleaning in Solvents Barbagini F, Halder S, Janssens T, Kenis K, Wostyn K, Bearda T, Quoc TL, Leunissen P, Mertens P, Kim KH, Andreas M Journal of Adhesion Science and Technology, 23(12), 1709, 2009 |
| 3 |
Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces De Witte H, De Gendt S, Douglas M, Conard T, Kenis K, Mertens PW, Vandervorst W, Gijbels R Journal of the Electrochemical Society, 147(5), 1915, 2000 |
| 4 |
Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5 nm gate oxides De Gendt S, Knotter DM, Kenis K, Mertens PW, Heyns MM Journal of the Electrochemical Society, 145(7), 2589, 1998 |