검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigations of plasma properties during TiN deposition by a modified pulsed arc process Keutel K, Hettkamp E, Fuchs H Thin Solid Films, 458(1-2), 173, 2004 |
| No. | Article |
|---|---|
| 1 |
Investigations of plasma properties during TiN deposition by a modified pulsed arc process Keutel K, Hettkamp E, Fuchs H Thin Solid Films, 458(1-2), 173, 2004 |