화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 III-V tri-gate quantum well MOSFET: Quantum ballistic simulation study for 10 nm technology and beyond
Datta K, Khosru QDM
Solid-State Electronics, 118, 66, 2016
2 Low-temperature formation of highly reliable silicon-nitride gate dielectrics with suppressed soft-breakdown phenomena for advanced complementary metal-oxide-semiconductor technology
Nakajima A, Khosru QDM, Yoshimoto T, Kidera T, Yokoyama S
Journal of Vacuum Science & Technology B, 20(4), 1406, 2002
3 High-quality NH3-annealed atomic layer deposited Si-nitride/SiO2 stack gate dielectrics for sub-100 nm technology generations
Khosru QDM, Nakajima A, Yoshimoto T, Yokoyama S
Solid-State Electronics, 46(10), 1659, 2002