검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Analysis of GaN etching damage by capacitively coupled RF Ar plasma exposure Kawakami R, Inaoka T, Minamoto S, Kikuhara Y Thin Solid Films, 516(11), 3478, 2008 |
| No. | Article |
|---|---|
| 1 |
Analysis of GaN etching damage by capacitively coupled RF Ar plasma exposure Kawakami R, Inaoka T, Minamoto S, Kikuhara Y Thin Solid Films, 516(11), 3478, 2008 |