검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Patterning of AlN, Inn, and GaN in KOH-Based Solutions Mileham JR, Pearton SJ, Abernathy CR, Mackenzie JD, Shul RJ, Kilcoyne SP Journal of Vacuum Science & Technology A, 14(3), 836, 1996 |
| 2 |
High-Density Plasma-Etching of III-V Nitrides Vartuli CB, Pearton SJ, Abernathy CR, Shul RJ, Howard AJ, Kilcoyne SP, Parmeter JE, Hagerottcrawford M Journal of Vacuum Science & Technology A, 14(3), 1011, 1996 |