검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Selective etching process of SrBi2Ta2O9 and CeO2 for self-aligned ferroelectric gate structure Shim SII, Kwon YS, Kim SII, Kim YT Journal of Vacuum Science & Technology A, 22(4), 1559, 2004 |
| No. | Article |
|---|---|
| 1 |
Selective etching process of SrBi2Ta2O9 and CeO2 for self-aligned ferroelectric gate structure Shim SII, Kwon YS, Kim SII, Kim YT Journal of Vacuum Science & Technology A, 22(4), 1559, 2004 |