화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Deposition and Modification of Titanium Nitride by Ion-Assisted Are Deposition
Bendavid A, Martin PJ, Wang X, Wittling M, Kinder TJ
Journal of Vacuum Science & Technology A, 13(3), 1658, 1995
2 Optical and Mechanical-Properties of Carbon Nitride Films Prepared by Ion-Assisted Are Deposition and Magnetron Sputtering
Wang X, Martin PJ, Kinder TJ
Thin Solid Films, 256(1-2), 148, 1995
3 Properties of Thin-Films of Tantalum Oxide Deposited by Ion-Assisted Deposition
Martin PJ, Bendavid A, Swain M, Netterfield RP, Kinder TJ, Sainty WG, Drage D, Wielunski L
Thin Solid Films, 239(2), 181, 1994