검색결과 : 1건
No. | Article |
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1 |
Effects of excess oxygen introduced during sputter deposition on carrier mobility in as-deposited and postannealed indium-tin-oxide films Kikuchi N, Kusano E, Kishio E, Kinbara A, Nanto H Journal of Vacuum Science & Technology A, 19(4), 1636, 2001 |