화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 SCALPEL mark detection using Si/SiO2 and 100 keV backscattered electrons
Farrow RC, Mkrtchyan M, Kizilyalli IC, Waskiewicz WK, Hopkins LC, Alakan A, Gibson G, Brown P, Misra S, Trimble L
Journal of Vacuum Science & Technology B, 19(5), 1852, 2001
2 Implementing advanced lithography technology: A 100 MHz, 1 V digital signal processor fabricated with phase shifted gates
Watson GP, Kizilyalli IC, Nalamasu O, Cirelli RA, Miller M, Wang Y, Pati B, Radosevich J, Kohler R, Freyman R, Klemens F, Mansfield W, Vaidya H, Timko A, Trimble L, Frackoviak J
Journal of Vacuum Science & Technology B, 18(6), 2877, 2000