검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization Klimecky P, Garvin C, Galarza CG, Stutzman BS, Khargonekar PP, Terry FL Journal of the Electrochemical Society, 148(1), C34, 2001 |
| 2 |
Sensor Systems for Real-Time Feedback-Control of Reactive Ion Etching Benson TE, Kamlet LI, Ruegsegger SM, Hanish CK, Hanish PD, Rashap BA, Klimecky P, Freudenberg JS, Grizzle JW, Khargonekar PP, Terry FL, Barney B Journal of Vacuum Science & Technology B, 14(1), 483, 1996 |