검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optimization of chamber design and rapid thermal processing regimes for SiC substrates by temperature and thermal stress distribution Agueev OA, Svetlichnyi AM, Klovo AG, Kocherov AN, Izotovs DA Materials Science Forum, 433-4, 107, 2002 |