검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of silicon strain in shallow trench isolation Belyansky M, Klymko N, Conti R, Chidambarrao D, Liu F Journal of Vacuum Science & Technology A, 28(4), 829, 2010 |
| 2 |
Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress Belyansky M, Chace M, Gluschenkov O, Kempisty J, Klymko N, Madan A, Mallikarjunan A, Molis S, Ronsheim P, Wang Y, Yang D, Li Y Journal of Vacuum Science & Technology A, 26(3), 517, 2008 |