검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Real dimensional simulation of silicon etching in CF4+O-2 plasma Knizikevicus R Applied Surface Science, 201(1-4), 96, 2002 |
| No. | Article |
|---|---|
| 1 |
Real dimensional simulation of silicon etching in CF4+O-2 plasma Knizikevicus R Applied Surface Science, 201(1-4), 96, 2002 |