검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Molecular modeling and synthesis of polymers for use in applications requiring a low-k dielectric Beall GW, Murugesan S, Galloway HC, Koeck DC, Jarl J, Abrego F Polymer, 46(25), 11889, 2005 |
| 2 |
Microscopic investigations of chemo-mechanical polishing of tungsten Lim MS, van der Heide PAW, Perry SS, Galloway HC, Koeck DC Thin Solid Films, 457(2), 346, 2004 |
| 3 |
pH-mediated frictional forces at tungsten surfaces in aqueous environments Lim MS, Perry SS, Galloway HC, Koeck DC Journal of Vacuum Science & Technology B, 20(2), 575, 2002 |
| 4 |
The influence of chemical treatments on tungsten films found in integrated circuits Perry SS, Galloway HC, Cao P, Mitchell EJR, Koeck DC, Smith CL, Lim MS Applied Surface Science, 180(1-2), 6, 2001 |