검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
X-ray micro- and nanofabrication using a laser-plasma source at 1 nm wavelength Turcu ICE, Allot RM, Mann CM, Reeves C, Ross IN, Lisi N, Maddison BJ, Moon SW, Prewett P, Stevenson JTM, Ross AWS, Gundlach AM, Koek B, Mitchell P, Anastasi P, McCoard C, Kim NS Journal of Vacuum Science & Technology B, 15(6), 2495, 1997 |
| 2 |
Patterning Issues of 256Mb Dynamic Random-Access Memory X-Ray Masks Koek B, Jennings B, Grant R Journal of Vacuum Science & Technology B, 11(6), 2876, 1993 |