검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Enhanced Detection of Copper Impurity in Silicon Wafer by Dynamic Secondary Ion Mass Spectrometry Koh SF, Lim WL, Tou TY Electrochemical and Solid State Letters, 14(3), H110, 2011 |
| 2 |
Nondestructive localization of surface particles for elemental compositional analysis by TOF-SIMS Lee WP, Koh SF, Yow HK, Tou TY Electrochemical and Solid State Letters, 8(3), J5, 2005 |