검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A novel deep etching technology for Si and quartz materials Morikawa Y, Koidesawa T, Hayashi T, Suu K Thin Solid Films, 515(12), 4918, 2007 |
| 2 |
Plasma applications for biochip technology Ichiki T, Sugiyama Y, Taura R, Koidesawa T, Horiike Y Thin Solid Films, 435(1-2), 62, 2003 |