검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Carbon Contamination in an Etching Reactor Using Electron-Cyclotron-Resonance Plasma and the Effect of a N-2 Addition Miwa K, Aoyama M, Higuchi K, Inoue M, Kojiri H, Nagase K Journal of Vacuum Science & Technology A, 15(3), 1413, 1997 |