화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Fabrication and transport properties of 50-nm-wide Au/Cr/GaInAs electrode for electron wave interference device
Miyamoto Y, Kokubo A, Oguchi H, Kurahashi M, Furuya K
Applied Surface Science, 159, 179, 2000
2 25 nm pitch GaInAs/InP buried structure: Improvement by calixarene as an electron beam resist and tertiarybutylphosphine as a P source in organometallic vapor phase epitaxy regrowth
Miyamoto Y, Kokubo A, Hattori T, Hongo H, Suhara M, Furuya K
Journal of Vacuum Science & Technology B, 16(6), 3894, 1998