검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Tantalum pentoxide obtained from TaNx and TaSi2 anodisation: an inexpensive and thermally stable high k dielectric Duenas S, Castan E, Barbolla J, Kola RR, Sullivan PA Solid-State Electronics, 45(8), 1441, 2001 |
| 2 |
Microstructure of Ta2O5 films grown by the anodization of TaNx Werder DJ, Kola RR Thin Solid Films, 323(1-2), 6, 1998 |
| 3 |
Marks for Alignment and Registration in Projection Electron Lithography Farrow RC, Liddle JA, Berger SD, Huggins HA, Kraus JS, Camarda RM, Tarascon RG, Jurgensen CW, Kola RR, Fetter L Journal of Vacuum Science & Technology B, 11(6), 2175, 1993 |
| 4 |
Patterning of X-Ray Masks Using the Negative-Acting Resist P(Si-CMS) Mixon DA, Novembre AE, Tai WW, Jurgensen CW, Frackoviak J, Trimble LE, Kola RR, Celler GK Journal of Vacuum Science & Technology B, 11(6), 2834, 1993 |
| 5 |
Study of Electron-Beam Patterning of Resist on Tungsten X-Ray Masks Cummings KD, Resnick DJ, Frackoviak J, Kola RR, Trimble LE, Grant B, Silverman S, Haas L, Jennings B Journal of Vacuum Science & Technology B, 11(6), 2872, 1993 |
| 6 |
Stress and Microstructure of Sputter-Deposited Thin-Films - Molecular-Dynamics Simulations and Experiment Fang CC, Jones F, Kola RR, Celler GK, Prasad V Journal of Vacuum Science & Technology B, 11(6), 2947, 1993 |