검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive ion etching induced damage evaluation for optoelectronic device fabrication Morello G, Quaglio M, Meneghini G, Papuzza C, Kompocholis C Journal of Vacuum Science & Technology B, 24(2), 756, 2006 |
| No. | Article |
|---|---|
| 1 |
Reactive ion etching induced damage evaluation for optoelectronic device fabrication Morello G, Quaglio M, Meneghini G, Papuzza C, Kompocholis C Journal of Vacuum Science & Technology B, 24(2), 756, 2006 |