검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Application of time-of-flight secondary ion mass spectrometry to the detection of surface intermediates during the first cycle of atomic layer deposition (ALD) of platinum on silica surfaces Konh M, Lien C, Zaera F, Teplyakov AV Applied Surface Science, 488, 468, 2019 |
| 2 |
Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH) Zhao J, Konh M, Teplyakov A Applied Surface Science, 455, 438, 2018 |