검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography Braun D, Gajic R, Kuchar F, Korntner R, Haugeneder E, Loeschner H, Butschke J, Letzkus F, Springer R Journal of Vacuum Science & Technology B, 21(1), 123, 2003 |